LIGO Document G1601702-v4

Room Temperature Mechanical Loss of Silicon Nitride-Silica Quarter-wave Stacks Deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) Method

Document #:
LIGO-G1601702-v4
Document type:
G - Presentations (eg Graphics)
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Abstract:
Room Temperature Mechanical Loss of Silicon Nitride-Silica Quarter-wave Stacks Deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) Method
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